| 摘要 |
<P>PROBLEM TO BE SOLVED: To apply a larger load to a table and to improve controllability in positioning control of the table, when driving the table in the direction of the Z axis and in the direction of θ around the Z axis. <P>SOLUTION: A Z stage apparatus 1 comprises: a rotating shaft 5 that is disposed with a Z-axis direction as a direction of an axis G and can be rotated around the axis G; a rotary ring 6 that is disposed on the rotating shaft 5 and can be rotated around the axis G; and an actuator 7 for rotating and driving each of the rotating shaft 5 and the rotary ring 6 around the axis G. The rotating shaft 5 and the rotary ring 6 are in contact mutually via a spiral surface S extended spirally around the axis G while being inclined in the direction of the Z axis. A rotary motion is converted to a translational motion on the spiral surface S, thus increasing a contact area and improving support stiffness of the table 4. <P>COPYRIGHT: (C)2009,JPO&INPIT |
