| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a production process abnormality-detecting method which easily detects the occurrence of abnormality, even if the abnormality relates to a plurality of inspection items, and quickly, easily feeds back the result of detection of abnormality when the abnormality is detected, in production processes which include a manufacturing process, which makes processing to products, and an inspecting process which inspects the products which is subjected to the manufacturing process, and sequentially process a plurality of products. <P>SOLUTION: For the first product group and the second product group among a plurality of products which are sequentially processed in production processes, the correlation coefficient between data on the former group and data on the latter group is computed (S403), the former and latter data being obtained through inspections using inspection items, which are different for each data group, in their inspection processes. It is determined whether abnormality occurs in a production process on the basis of a periodical change of the correlation coefficient (S406). <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
