| 摘要 |
PROBLEM TO BE SOLVED: To promptly change a temperature of a lower electrode on which a semiconductor substrate is mounted. SOLUTION: An apparatus 1 of manufacturing a semiconductor has: a lower electrode 4 arranged in a chamber 2 to mount a semiconductor substrate 9 with a fluid flowing path 10 for making a fluid flow therein; a plurality of temperature adjustment equipments 18 and 19 supplying fluids having different setting temperatures from each other; and switching means 11 and 12 selecting one fluid from among fluids having a plurality of setting temperatures supplied from a plurality of pieces of temperature adjustment equipment 18 and 19, and switching to make the selected fluid flow to the fluid flowing path 10 of the lower electrode 4. COPYRIGHT: (C)2009,JPO&INPIT |
