| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus that can raise and lower the temperature of a workpiece at high speed by heating the workpiece without heating a treatment container itself by using induction heating, and then preventing an unnecessary sticking film etc., from being deposited on the internal surface of the treatment container. SOLUTION: The treatment apparatus which heat-treats the workpiece W comprises: a treatment container 22 which can discharge gas and contain a plurality of workpieces; a coil portion 104 for induction heating, which is wound around the outer periphery of the treatment container; a high-frequency power source 110 which applies high-frequency electric power to the coil portion for induction heating; a gas supply means 90 for introducing necessary gas into the treatment container; and a holding means 24 which is inserted into and extracted from the treatment container while holding the workpiece and an induction heating body N induction-heated with a high frequency from the coil portion for induction heating. In the induction heating body, a groove portion 140 is formed in a cut shape to control a flow of an eddy current generated in the induction heating body. COPYRIGHT: (C)2009,JPO&INPIT
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