| 摘要 |
PROBLEM TO BE SOLVED: To provide a composite sealant having performance features such as vacuum seal performance, plasma resistance and corrosive gas resistance, and capable of minimizing generation of a particle by abrasion of a seal member particularly formed of a hard material such as a synthetic resin in use, needless to say to protect an elastic body from corrosive gas, without reducing the plasma resistance and the corrosive gas resistance, even when used in a place subjected to repeated opening-closing such as a gate valve opening-closing part. SOLUTION: This composite sealant has a first seal member 6 composed of an elastic member, and a second seal member 8 installed on the inner peripheral surface side of a one-sided dovetail groove 2, oppositely arranged to a mating member 36 and formed of the hard material, and is characterized in that the first seal member 6 is formed by projecting a projection part 12 in the horizontal direction, and its radial inner peripheral side tip part 12a is arranged by abutting on a vertical surface 2a, and the second seal member 8 is arranged by abutting on the vertical surface 2a vertical to the one-sided dovetail groove 2 on the opening end surface side of the one-sided dovetail groove 2. COPYRIGHT: (C)2009,JPO&INPIT
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