| 摘要 |
PROBLEM TO BE SOLVED: To provide an article surface inspecting method and an article surface inspecting apparatus, capable of easily and surely detecting a raised flaw formed on a surface of an article moving on a moving stage. SOLUTION: The article surface inspecting method which inspects the surface of a material to be inspected R being set and moving on the moving stage V, comprises: a first step of photographing the surface of the material to be inspected R by using a photographing device 1 while illuminating the material to be inspected R with light by using an illuminating device 2; a second step of taking in the image photographed by the photographing device 1; and a third step of detecting whether or not a raised area P is formed on the material to be inspected R, in accordance with a prescribed baseline by using the image, and determining whether or not the surface of the material to be inspected R is in an abnormal condition. COPYRIGHT: (C)2009,JPO&INPIT
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