| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that, in an electrostatic chuck of post fire type, the hermetical isolation from the atmosphere within a chamber is difficult because an electrode is exposed to the atmosphere in the chamber, and also the problem that, in the case where the electrode is bi-pole type, discharging is easy to occur between electrodes since there is a gap between the electrodes. SOLUTION: In the method for manufacturing the electrostatic chuck having such structure as two sheets of insulating layers of ceramics are bonded together with an internal electrode layer in between, when two sheets of insulating layers are bonded together with an internal electrode layer in between, the internal electrode layer and an electrically insulating joining material are simultaneously bonded to each of the two sheets of insulating layers by simultaneously sandwiching electrically insulating joining material whose at least upper and lower surfaces are made from adhesive material, in a portion of the space where no internal electrode layer exists, in the space between the two sheets of insulating layers. COPYRIGHT: (C)2009,JPO&INPIT |
