发明名称 |
PROGRAM TEST DEVICE AND PROGRAM |
摘要 |
<p>A conventional group control system has the problem that one or more recipes which can be influenced by the change of a process parameter cannot be known easily. One or more recipes which can be influenced by the change of the process parameter can be known easily by a process information management device equipped with following parts: a recipe storage part in which two or more recipes being information on a process held by two or more controllers are stored respectively in association with the two or more controllers; a receiving part which receives process parameter information being information on the process parameter included in the recipes; a recipe information acquisition part which searches the recipes from the recipe storage part using the process parameter information to acquire recipe information being information on the searched recipe; and an output part which outputs the recipe information acquired by the recipe information acquisition part.</p> |
申请公布号 |
WO2009096322(A1) |
申请公布日期 |
2009.08.06 |
申请号 |
WO2009JP51035 |
申请日期 |
2009.01.23 |
申请人 |
TOKYO ELECTRON LIMITED;NISHIMURA, MASARU |
发明人 |
NISHIMURA, MASARU |
分类号 |
G06F11/28 |
主分类号 |
G06F11/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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