发明名称 PROGRAM TEST DEVICE AND PROGRAM
摘要 <p>A conventional group control system has the problem that one or more recipes which can be influenced by the change of a process parameter cannot be known easily. One or more recipes which can be influenced by the change of the process parameter can be known easily by a process information management device equipped with following parts: a recipe storage part in which two or more recipes being information on a process held by two or more controllers are stored respectively in association with the two or more controllers; a receiving part which receives process parameter information being information on the process parameter included in the recipes; a recipe information acquisition part which searches the recipes from the recipe storage part using the process parameter information to acquire recipe information being information on the searched recipe; and an output part which outputs the recipe information acquired by the recipe information acquisition part.</p>
申请公布号 WO2009096322(A1) 申请公布日期 2009.08.06
申请号 WO2009JP51035 申请日期 2009.01.23
申请人 TOKYO ELECTRON LIMITED;NISHIMURA, MASARU 发明人 NISHIMURA, MASARU
分类号 G06F11/28 主分类号 G06F11/28
代理机构 代理人
主权项
地址