Device i.e. selective compliance assembly robot arm robot, for transporting substrate, has joint arms driven by gear wheel that is rotatable at rotor and combined with gear rod that is integrated in guide rail
摘要
<p>The device has a receiving platform comprising a linear drive with a rotor (50) driven by a linear motor (49) along a guide rail (48). Joint arms are parallelly shifted with respect to an arm (51) by retaining devices (52). The joint arms are rotatably arranged at the rotor. The joint arms are connected with each other by a pivot joint (54). The joint arms are driven by a gear wheel that is rotatable at the rotor. The joint arms are combined with a gear rod that is integrated in the guide rail. Sensors detect a substrate carried by gripping tools of the retaining devices.</p>
