SHEET STORING CARRIER SYSTEM AND RETICLE CASE MAKING USE OF THE SAME

摘要

A thin plate storage transport system including a pressure container for containing a thin plate provided with a container main body for containing one or a plurality of thin plates, a lid body attached by covering the container main body, and a seal for airtightly isolating a containing space formed inside from an outside environment when the container main body is closed and covered by the lid body; and a pressure supply device for setting a pressure inside the containing space at a set pressure higher than an outside pressure by supplying a pressure into the containing space of the pressure container for containing a thin plate. As a result, the inside of the containing space can be kept at high cleanliness for a long time.