发明名称 METHOD OF FABRICATING A HYBRID SUBSTRATE
摘要 <p>The invention concerns a method of producing a mixed substrate, that is to say a substrate comprising at least one block of material different from the material of the substrate, the method comprising the following successive steps: formation of a cavity in a substrate of first material, and from one of its faces, the formation of the cavity being carried out so as to leave at least part of the first material projecting from the bottom of the cavity, formation of the block by means of a reaction, initiated from the walls of the cavity, between the first material and at least one chemical element contributed in order to obtain a second material filling the cavity, the formation of the block being carried out so as to obtain, from the part of the first material projecting, a protrusion of second material projecting on said face of the substrate.</p>
申请公布号 EP2084736(A1) 申请公布日期 2009.08.05
申请号 EP20070847476 申请日期 2007.11.28
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 MORICEAU, HUBERT;SARTORI, SYLVIE;CHARVET, ANNE-MARIE
分类号 H01L21/3105;H01L21/762 主分类号 H01L21/3105
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