发明名称 Method and system for loading substrate supports into a substrate holder
摘要 Wafer supports are provided that have a diameter smaller than the diameter of the wafer that they are to support in a wafer boat. The perimeter of the wafer support is preferably continuous, extending completely around in a 360° span, and is sized to fit between the protrusions supporting a particular wafer in a wafer cassette. To load the wafer boat, an end effector removes the wafer support from a wafer boat and moves the wafer support into a wafer cassette, where the end effector moves upward to seat a wafer upon the wafer support. The wafer and wafer support are then transported to the wafer boat and the wafer support and the wafer are lowered onto a wafer slot surface in a wafer slot in the wafer boat, to transfer the wafer support and wafer from the end effector to the wafer boat.
申请公布号 US7570876(B2) 申请公布日期 2009.08.04
申请号 US20070669842 申请日期 2007.01.31
申请人 ASM INTERNATIONAL N.V. 发明人 DE RIDDER CHRISTIANUS GERARDUS MARIA
分类号 A21B2/00;B65G49/07;C23C16/00;G01R1/00;G01R31/28;H01L21/324;H01L21/677;H01L21/68;H01L21/683 主分类号 A21B2/00
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