发明名称 |
Correction device for correcting geometric error of position sensor unit of positioning system of e.g. measuring system, has unit, where device emits modified measuring signal with information and correction value is determined for unit |
摘要 |
<p>The device (60) has a sensor, where the device receives and emits a measuring signal with error prone position information valuable for determination of a current position of an element, and corrects the information by processing corresponding correction value. A modified measuring signal is emitted by the device with corrected position information, and a correction value is specially determined for a predetermined position sensor unit (50). The measuring signal has a carrier signal e.g. sinusoidal signal, modulated with the information by frequency or phase or amplitude modulation. Independent claims are also included for the following: (1) a method for correcting a position sensor unit (2) a positioning system comprising a program memory.</p> |
申请公布号 |
DE102008006927(A1) |
申请公布日期 |
2009.07.30 |
申请号 |
DE20081006927 |
申请日期 |
2008.01.24 |
申请人 |
AFM TECHNOLOGY GMBH |
发明人 |
BANZHAF, KLAUS;HAGENEY, THEO;MEYER, WOLFRAM;BULLINGER, ALEXANDER;GALL, CHRISTOPF |
分类号 |
G01B21/04;B23Q16/00;G05B19/401;H01L21/68 |
主分类号 |
G01B21/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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