| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a protective film capable of preventing a structural change during the formation of a protective film when precise cross section information in proximity of the surface of a liquid permeable material or a material susceptible to heat and ion impact is obtained by FIB. SOLUTION: The method of forming a protective film forms a protective film covering the surface of an object to be processed used for processing a cross section by an FIB device by condensing and solidifying a gaseous material that is the raw material of the protective film. COPYRIGHT: (C)2009,JPO&INPIT
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