| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector which uses piezoelectric actuators, the optical deflector being capable of speedily and precisely detecting and controlling a driving state of a mirror. SOLUTION: Optical deflectors A and A' have a mirror portion 1 having a reflecting surface 1b, and first piezoelectric actuators 8a to 8d supported having one-end sides coupled to torsion bars 2a and 2b and the other-end sides coupled to a support portion 10, and drives and rotates the mirror portion 1 through the torsion bars 2a and 2b through piezoelectric driving of the first piezoelectric actuators 8a to 8d. The optical deflectors include second piezoelectric actuators 9a to 9d supported having one-end sides coupled to the torsion bars 2a and 2b and the other-end sides coupled to the mirror portion 1. COPYRIGHT: (C)2009,JPO&INPIT
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