| 摘要 |
An air cylinder raising and lowering a pickup head for holding an IC device in an electronic device test apparatus, the air cylinder includes a cylinder tube; a piston; a first hollow chamber formed below the piston; a second hollow chamber formed above the piston and being larger than the first hollow chamber in terms of a pressure receiving area of the piston; and a rod with one end coupled with the piston and the other end coupled with the pickup head. The first hollow chamber is connected to the air feed device via a first feed system in which the air feed is secured even if the electric power supply of the electronic device test apparatus is cut off, and the second hollow chamber is connected to the air feed device via a second feed system having a shutoff valve.
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