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发明名称
ZENTRIFUGALSINTERSYSTEM
摘要
申请公布号
DE60328046(D1)
申请公布日期
2009.07.30
申请号
DE20036028046
申请日期
2003.12.25
申请人
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;SINTO V-CERAX LTD.
发明人
WATARI, KOJI;KINEMUCHI, YOSHIAKI;UCHIMURA, SHOJI;ISHIGURO, HIROHIDE;MORIMITSU, HIDEKI
分类号
B22F3/06;C04B35/64;B22F3/00;C04B35/10;C04B35/48;C04B35/575;F27B17/00;H01L21/687
主分类号
B22F3/06
代理机构
代理人
主权项
地址
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