| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize a highly precise appearance inspection by using converging light in an illuminating apparatus for use in appearance inspection and an appearance inspecting apparatus, and to make the apparatuses compact. <P>SOLUTION: The illuminating apparatus 10 for use in appearance inspection, which illuminates a substrate to be inspected 21 with illumination light, includes: a surface light source 11 for emitting scattered light SL; a parallel light extracting member 12 for extracting approximately parallel light PL from the scattered light SL emitted by the surface light source 11; and a condenser lens 13 for condensing the approximately parallel light PL extracted by the parallel light extracting member 12. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
