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发明名称
POSITIVPHOTORESISTZUSAMMENSETZUNG UND VERFAHREN ZUR AUSBILDUNG EINER RESISTSTRUKTUR
摘要
申请公布号
DE602004021601(D1)
申请公布日期
2009.07.30
申请号
DE200460021601T
申请日期
2004.07.15
申请人
TOKYO OHKA KOGYO CO. LTD.
发明人
MASUDA, YASUO;OKUI, TOSHIKI
分类号
C08G8/00;C08G8/10;C08G14/00;C08L61/06;G03F7/023;H01L21/027
主分类号
C08G8/00
代理机构
代理人
主权项
地址
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