| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a vibrating piece and vibrator. <P>SOLUTION: The manufacturing method prepares a support 10 which has first and second surfaces 12 and 14 which face opposite to each other and define thickness, a base 16, and a plurality of arm parts 18 which are orthogonal in the thickness direction from the base 16 and extend side by side. The support 10 has a lower part electrode film 20 formed on the respective first surfaces 12 of the plurality of arm parts 18, a piezoelectric film 22 formed on the lower part electrode film 20, has an upper part electrode film 26 formed on the piezoelectric film 22, and at least part of the respective plurality of arm parts 18 has exposure areas 30 on the second surfaces 14. The exposure areas 30 on the second surfaces 14 are etched. By reducing the thickness by etching, the plurality of arm parts 18 easily bend in the thickness direction. <P>COPYRIGHT: (C)2009,JPO&INPIT |
