发明名称 SUBSTRATE TRANSFER APPARTUS
摘要 A substrate transfer apparatus that is designo provide an inclined transfer function that improves liquid saving efficiency of a process solution (developing solution) during the transfer of the substrate. The substrate transfer apparatus includes a first transfer unit for transferring a substrate, a second transfer unit spaced apart from an end of the first transfer unit, a third transfer unit disposed between the first and second transfer units and providing an inclined transfer that is capable of saving a developing solution adhered to the substrate during transfer of the substrate, and a transfer controller for controlling an inclined transfer angle and a connection state of the third transfer unit.
申请公布号 US2009190109(A1) 申请公布日期 2009.07.30
申请号 US20080323807 申请日期 2008.11.26
申请人 DMS CO., LTD. 发明人 JEONG CHUN-SEOK;PARK HO-YOUN;LEE SOK-JOO;LEE SEUNG-WON
分类号 G03B27/42 主分类号 G03B27/42
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