摘要 |
<p>This invention relates to organometallic compounds having the formula (L1)M(L2)y wherein M is a metal or metalloid, L1 is a substituted or unsubstituted anionic 6 electron donor ligand, L2 is the same or different and is (i) a substituted or unsubstituted anionic 2 electron donor ligand, (ii) a substituted or unsubstituted anionic 4 electron donor ligand, (iii) a substituted or unsubstituted neutral 2 electron donor ligand, or (iv) a substituted or unsubstituted anionic 4 electron donor ligand with a pendant neutral 2 electron donor moiety; and y is an integer of from 1 to 3; and wherein the sum of the oxidation number of M and the electric charges of L1 and L2 is equal to 0; a process for producing the organometallic compounds, and a method for producing a film or coating from the organometallic compounds. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.</p> |
申请人 |
PRAXAIR TECHNOLOGY, INC.;THOMPSON, DAVID, M.;GEARY, JOAN;LAVOIE, ADRIEN, R.;DOMINGUEZ, JUAN, E. |
发明人 |
THOMPSON, DAVID, M.;GEARY, JOAN;LAVOIE, ADRIEN, R.;DOMINGUEZ, JUAN, E. |