| 摘要 |
PROBLEM TO BE SOLVED: To provide a wear resistant hard film having solid lubricity and nonaffinity, and to provide an article fitted with the film. SOLUTION: Disclosed is a composite wear resistant hard film having solid lubricity and nonaffinity composed in such a manner that the surface of a laminated compound film of a single layer or two or more composed of one or more elements selected from Cr, Al, Si, Y and B, and one or more elements selected from C and N is provided with an oxide film of one or more elements selected from Cr, Al, Si, Y and B as constituting elements of the laminated compound film. COPYRIGHT: (C)2009,JPO&INPIT
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