发明名称 PRODUCTION METHOD FOR ELECTROLUMINESCENT ELEMENT
摘要 The main object of the present invention is to provide a method for manufacturing an EL element, capable of preferably carrying out the peeling operation at the time of peeling off an unnecessary layer such as a photoresist layer. In order to achieve the object, the present invention provides a method for manufacturing an EL element comprising: an organic EL layer forming process of forming an organic EL layer on a substrate, on which at least an electrode layer is formed; a peeling layer forming process of forming a peeling layer on the organic EL layer; a photoresist layer forming process of forming a photoresist layer on the peeling layer; a photoresist layer patterning process of patterning the photoresist layer by exposing and developing; an organic EL layer developing process of removing the organic EL layer of a part not covered with the photoresist layer; and a peeling layer peeling process of removing the photoresist layer laminated thereon by peeling off the peeling layer.
申请公布号 US2009191486(A1) 申请公布日期 2009.07.30
申请号 US20090420163 申请日期 2009.04.08
申请人 TACHIKAWA TOMOYUKI;ITO NORIHITO 发明人 TACHIKAWA TOMOYUKI;ITO NORIHITO
分类号 G03F7/20;H05B33/10;H01L27/32;H01L51/40;H01L51/50;H01L51/56 主分类号 G03F7/20
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