发明名称 |
PRODUCTION METHOD FOR ELECTROLUMINESCENT ELEMENT |
摘要 |
The main object of the present invention is to provide a method for manufacturing an EL element, capable of preferably carrying out the peeling operation at the time of peeling off an unnecessary layer such as a photoresist layer. In order to achieve the object, the present invention provides a method for manufacturing an EL element comprising: an organic EL layer forming process of forming an organic EL layer on a substrate, on which at least an electrode layer is formed; a peeling layer forming process of forming a peeling layer on the organic EL layer; a photoresist layer forming process of forming a photoresist layer on the peeling layer; a photoresist layer patterning process of patterning the photoresist layer by exposing and developing; an organic EL layer developing process of removing the organic EL layer of a part not covered with the photoresist layer; and a peeling layer peeling process of removing the photoresist layer laminated thereon by peeling off the peeling layer.
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申请公布号 |
US2009191486(A1) |
申请公布日期 |
2009.07.30 |
申请号 |
US20090420163 |
申请日期 |
2009.04.08 |
申请人 |
TACHIKAWA TOMOYUKI;ITO NORIHITO |
发明人 |
TACHIKAWA TOMOYUKI;ITO NORIHITO |
分类号 |
G03F7/20;H05B33/10;H01L27/32;H01L51/40;H01L51/50;H01L51/56 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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