| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for stably supplying a phase diffraction grating constituting an X-ray Talbot interferometer and an amplitude diffraction grating. <P>SOLUTION: The X-ray is radiated to the negative X-ray photosensitive resin 30 formed on a panel 6 through an X ray mask 31 having an X-ray transmitting section and an X-ray absorbing section. The X-ray photosensitive resin 30 is exposed to the X-ray passing through the X-ray transmitting section and to the X-ray whose intensity drops down to 1/50 or larger and 1/10 or smaller when passing through the X-ray absorbing section (exposing process). The non-exposed areas 34 are removed to form resin barriers 36 on the panel and film like bridges 35 are formed to connect the tops of adjacent resin barriers 36 (developing process). Further, by removing the bridges 35 (removing process), X-ray absorbing metal sections 11 are formed between the resin barriers by an electroforming method (electro-plating process). <P>COPYRIGHT: (C)2009,JPO&INPIT |
