APPARATUS AND METHOD FOR SURFACE TREATMENT WITH PLASMA IN ATMOSPHERIC PRESSURE HAVING PARALLEL PLATES TYPE ELECTRODE STRUCTURE

摘要

An atmospheric pressure plasma surface processing apparatus having a parallel flat type electrode structure and a surface processing method thereof are provided to process efficiently surfaces of chemical active species by preventing damage due to charged particles. An atmospheric pressure plasma surface processing apparatus(100) having a parallel flat type electrode structure includes a power electrode and lower grounding electrodes(31,32). The power electrode receives a voltage. The lower grounding electrodes are installed under the power electrode. The lower grounding electrodes are opposite to the power electrode in order to form lower plasma generation spaces(41,42). A plurality of outlets(53) are formed at the lower grounding electrodes in order to discharge the plasma and the processing gas. The thickness of the lower grounding electrode is 3-50mm.