发明名称 ROTARY JOINT
摘要 PROBLEM TO BE SOLVED: To provide a rotary joint capable of eliminating generation of abrasion powder at a part connecting a non-rotation pipe and a rotation pipe, and capable of eliminating incorporation of the abrasion powder into fluid such as passing pure water, washing liquid, nitrogen gas, mixture of the pure water and the nitrogen gas or mixture of the washing liquid and the nitrogen gas. SOLUTION: The rotary joint 1 comprises a hollow member 6 having a fluid introduction hole 5, a hollow rotation shaft member 12 mounted to a hollow part 2 of the hollow member 6, a contact-type bearing 13 for enabling the hollow rotation shaft member 12 to freely rotate in a direction R, a high-pressure gas supply means 17 for supplying high-pressure gas to a cylindrical clearance 16 between an inner peripheral surface 14 of the hollow member 6 and an outer peripheral surface 15 of the hollow rotation shaft member 12, and a high-pressure gas exhaust means 18 for exhausting the high-pressure gas supplied to the cylindrical clearance 16 to outside 4. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009168068(A) 申请公布日期 2009.07.30
申请号 JP20080004555 申请日期 2008.01.11
申请人 MIMASU SEMICONDUCTOR INDUSTRY CO LTD;OILES IND CO LTD 发明人 TSUCHIYA MASATO;MUROOKA HIDEYUKI;OZAWA HIDEO;SATO HIKARI;TSUNODA KOICHI
分类号 F16J15/40;F16J15/54;F16L27/08 主分类号 F16J15/40
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