Glass composition exclusively consisting of oxides which already at low temperatures form volatile fluorides by reaction with fluorine and its use

摘要

The glass is advantageous for microstructuring, especially reactive ion etching with fluorine and fluorine compounds, and has a glass composition based on oxide content and expressed in mol % of: SiO2, 40-70; GeO2, 0-30; B2O3, 5-20; P2O5, 5-20; WO3, 0-10; As2O3, 0-10; Yb2O3, 0-5; and Lu2O3, 0-5. Microstructure components, such as micro arrays, Fresnel lenses, micro wafers, or micro lens wafers, made by a method including reactive ion etching from the glass are also part of the present invention.