Gas supplying system, has gas supply circuit connected to another gas supply circuit and extraction circuit by three way control valves, where valves permit flow of gas form gas inlet to air outlet, when valves are in position

摘要

The system has a gas inlet (10) connected to a sealed housing (11) i.e. clean room, through a gas supply circuit with a sealed duct (13). A gas supply circuit (19) is connected to the former gas supply circuit and an extraction circuit by three way control valves (20, 21), respectively. The valves permit the flow of gas form the inlet to a gas outlet (15), when the valves are in a position. The valves permits to flow the gas in a gas recycling loop formed by the extraction circuit and the gas supply circuits when the valves are in another position.