| 摘要 |
PROBLEM TO BE SOLVED: To provide a resistance heating filament which does not generate fluctuation of an amount of evaporation caused by formation of oxide even when repeated vacuum deposition is conducted. SOLUTION: The problem is solved by including an oxide layer, which in turn is formed by oxidizing a surface of the filament and has an even thickness of≥1.0μm, on the surface of the resistance heating filament. COPYRIGHT: (C)2009,JPO&INPIT
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