| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an imprinting device which can uniformly apply pressure between a die and an object to be imprinted and can raise and lower the temperature at a high speed, and an imprinting method. <P>SOLUTION: The imprinting device (1) used to transfer a pattern of a die (100) to a film-like object (200) to be imprinted includes a stage (11) for holding the die (100), a pressurizing chamber forming housing (13) that constitutes the pressurizing chamber (12) together with the object (200) to be imprinted, a closing means (14) for closing between the pressurizing chamber forming housing (13) and the object (200) to be imprinted, an opening and closing means (15) for opening and closing between the pressurizing chamber forming housing (13) and the object (200) to be imprinted, a pressurizing means (16) for adjusting the pressure in the pressurizing chamber (12), a heating means (17) for heating the object (200) to be imprinted, and a gas removing means (18) for removing the gases between the die (100) and the object (200) to be imprinted. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
