The present invention relates to a method of processing an article (16) to remove outgassing substances. The method comprises: placing an article in a closed processing region (12); reducing a pressure in the processing region so that the article (16) is exposed to a pressure to control a rate of outgassing from the article; and disposing outgases (15) released from the article. The present invention also relates to abatement apparatus (10) for processing an article (16) to remove outgassing substances. The apparatus comprises: a processing region (12); vacuum pumping means (20) for reducing a pressure in the processing region (12); control means (28) for controlling a rate of outgassing from the article (16); and disposal means (22) for disposing of outgases (15) released from the article.
