| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generating device in which a volume of a plasma generating region is enlarged. <P>SOLUTION: The plasma generating device 110 has a case portion 11 made of a calcined body composed of a raw material of alumina (Al2O3). The case portion 11 has a gas introduction entrance 11i of a slit shape and a plurality of gas ejection ports 11o of a cylindrical shape. A slit width (a back and forth direction in Fig.2A and a right and left direction in Fig.2B) is 1 mm from the gas introduction entrance 11i up to above the plasma generating region P and the gas ejection port 11o of an inner diameter 1 to 2 mm is formed in a straight line in a longitudinal direction of the plasma generating region P. A cross section of the plasma generating region P is a square of a side 2 to 5 mm. Electrodes 2a and 2b have concave (hollow) portions on surfaces facing each other. A commercial AC voltage of 60 Hz/100 V is used to raise voltage up to about 9 kV, which is impressed between the electrodes 2a, 2b at 20mA, and when argon is introduced from the gas introduction entrance 11i, a plasma generation is confirmed even if the electrodes 2a, 2b are separated up to 4 cm. <P>COPYRIGHT: (C)2009,JPO&INPIT |
