| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for adjusting a resonance frequency by detecting a resonance frequency in a natural vibration mode of a swingable body in a stage before mounting a driving means. SOLUTION: Disclosed are a method for detecting a swinging condition of a swingable body which is swingably supported by a resilient support section around a torsion axis with respect to a support substrate and a method for adjusting a resonance frequency. The method for detecting a swinging condition comprises a process for radiating laser light to the swingable body so as to vibrate the swingable body while applying an impact to the swingable body by the laser light, and a process for detecting a resonance frequency as a frequency in a natural vibration mode of the swingable body by means of a detecting means for detecting a swinging condition of the swingable body due to the impact. In the method for adjusting a resonance frequency, the resonance frequency as the frequency in the natural vibration mode of the swingable body is adjusted by using the method for detecting a swinging condition of the swingable body. COPYRIGHT: (C)2009,JPO&INPIT
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