| 摘要 |
An RF based, gridless improved plasma source and method of operating a plasma source comprising a RF coupler, a first stage with a helicon-like system, a ICH second stage, a ionization chamber, magentic means which are strengthened on the downstream end of the first stage, to control the plasma flux, ionization fraction, spatial distribution. |
| 申请人 |
AD ASTRA ROCKET COMPANY;CHANG DIAZ, FRANKLIN, R.;SQUIRE, JARED, P.;GLOVER, TIM, W.;CASSADY, LEONARD, D.;CARTER, MARK, D.;MCCASKILL, GREG, E. |
发明人 |
CHANG DIAZ, FRANKLIN, R.;SQUIRE, JARED, P.;GLOVER, TIM, W.;CASSADY, LEONARD, D.;CARTER, MARK, D.;MCCASKILL, GREG, E. |
