发明名称 METHOD OF PRODUCING PIEZOELECTRIC TUBES
摘要 A method and apparatus for forming piezoelectric tubes is provided. The method includes forming a suspension (1) of ceramic particles (2) in a fluid medium (3), positioning a rod (5) in the fluid medium (3), depositing particles (2) on the rod (5) by electrophoresis, and heat-treating the deposited particles to form a piezoelectric tube by heating the deposited particles to a first predetermined temperature to solidify the particles to a surface of the rod and burn the rod, thereby leaving a tube of solidified particles closed at one end, and heating the tube to a second predetermined temperature to thereby sinter the tube to form a dense ceramic tube. The apparatus is adapted for carrying out the method.
申请公布号 EP1639657(B1) 申请公布日期 2009.07.15
申请号 EP20040710575 申请日期 2004.02.12
申请人 NANYANG TECHNOLOGICAL UNIVERSITY 发明人 MA, JAN;BOEY, YIN CHIANG
分类号 H01L41/24;C23C2/04;C23C26/02;C25D13/02;C25D13/20 主分类号 H01L41/24
代理机构 代理人
主权项
地址