| 摘要 |
In a transistor of the invention, at a boundary between gate oxide 112 formed on a silicon substrate 101 of a device formation region 10 and a device isolation film 110 adjoining the gate oxide 112, a thickness D' of the gate electrode 114 is set larger than a uniform thickness D of the gate electrode 114 on the gate oxide 112. A height difference A between a surface of the gate oxide 112 and a surface of the device isolation film 110, a width B of a step portion 110b of the device isolation film, and the thickness D of the gate electrode 114 in its uniform-thickness portion satisfy relationships that D>B and A/D+(1-(B/D)2)0.5>1. By ion implantation via the gate electrode 114 and the gate oxide 112, an impurity is added into a surface portion of the silicon substrate 101 at an end portion 11 of the device formation region, the impurity having concentrations higher than in the surface portion of the silicon substrate 101 in the electrode uniform portion 12 of the device formation region. The transistor can be prevented from occurrence of the inverse narrow channel effect and kink characteristics, thus being suitable for scale-down of LSIs, and yet can be manufactured with less steps.
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