发明名称 Process for forming an electronic device including semiconductor layers having different stresses
摘要 An electronic device can have an insulating layer lying between a first semiconductor layer and a base layer. A second semiconductor layer, having a different composition and stress as compared to the first semiconductor layer, can overlie at least a portion of the first semiconductor layer. In one embodiment, a first electronic component can include a first active region that includes a first portion of the first and the second semiconductor layers. A second electronic component can include a second active region that can include a second portion of the first semiconductor layer. Different processes can be used to form the electronic device. In another embodiment, annealing a workpiece can be performed and the stress of at least one of the semiconductor layers can be changed. In a different embodiment, annealing the workpiece can be performed either before or after the formation of the second semiconductor layer.
申请公布号 US7560318(B2) 申请公布日期 2009.07.14
申请号 US20060374372 申请日期 2006.03.13
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 SADAKA MARIAM G.;KOLAGUNTA VENKAT R.;TAYLOR WILLIAM J.;VARTANIAN VICTOR H.
分类号 H01L21/84 主分类号 H01L21/84
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