MULTI SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER EQUIPMENT THEREFOR

摘要

A multi substrate processing system and a substrate transfer device therefor are provided to process an exchange operation of processed substrates at high speed during multi substrate processes. The first support area(507) is extended in an arm neck(501) of a rotation plate arm. The second support area(508) is extended in one end of the first support area adjacent to the arm neck in the first direction. An external effecter entering area(504) is opened so that an end effecter(410) of another substrate transfer device enters through the first substrate entrance opened between a transfer chamber and the outside.