发明名称 Separate apparatus of solar wafer spitter
摘要 <p>A separating apparatus of a solar wafer splitter is provided to prevent a wafer from being damaged by spraying the fluid on a plurality of wafers received in a carrier through a nozzle. A separating apparatus of a solar wafer splitter includes a fixing body, a driving unit, a lift unit, and a nozzle unit. The fixing body is fixed in a frame of the splitter. A pair of rails(120) are formed in one side of the fixing body. A touch sensor is formed in a lower part of the fixing body. The driving unit includes a screw of a drive motor(210). The drive motor is installed in the upper part of the fixing body. The screw rotates according to the driving of the drive motor. The lift unit is connected to the driving unit. The lift unit includes a lift carrier(320). A plurality of wafers are received in the lift carrier. The nozzle unit includes a plurality of nozzles(410,430). The plurality of nozzles are formed in four sides of the lift carrier. The plurality of nozzles sprays the fluid.</p>
申请公布号 KR100907448(B1) 申请公布日期 2009.07.13
申请号 KR20090005718 申请日期 2009.01.22
申请人 发明人
分类号 H01L31/18;H01L21/67 主分类号 H01L31/18
代理机构 代理人
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