| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum valve controller capable of realizing a stable opened/closed state where chattering is not generated, when the valve body returns from an opened state to a closed state. SOLUTION: A pneumatic circuit is so formed as to suck air in an upper space inside a cylinder and to place the vacuum valve body into an opened state, by communicatively connecting a suction opening M to an ambient pressure side connector C2, when air pressure inside a connector C1 for water level detection is below an ambient pressure, and to bring air into the space and return the vacuum valve body into a closed state, by communicatively connecting the suction opening M to the ambient pressure side connector C2, when the air pressure inside the connector C1 for water level detection is higher than the ambient pressure. A partition wall PW is provided for preventing air suction from paths P2A, P2a for driving the pneumatic circuit to paths P2B, P2c, P2d for returning the vacuum valve main body 7 to a closed state, when the vacuum valve main body is in an intermediate state halfway back from the opened state to the closed state. COPYRIGHT: (C)2009,JPO&INPIT
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