| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS switch capable of holding off an increasing amount of voltage while a self-operation is avoided. SOLUTION: The MEMS switches (10, 30, 40) include: the substrate (12); first actuator members (21, 41) and second actuator members (22, 42) which are electrically combined with each other; an anchor (18) mechanically combined with the substrate 12 and supporting at least one of the first actuator members (21, 41) and the second actuator members (22, 42); and a gate driver (6) formed to operate the first actuator members (21, 41) and the second actuator members (22, 42). COPYRIGHT: (C)2009,JPO&INPIT
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