| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus that reliably prevents damage to substrates by interference between support members and the substrates by checking whether the support members of a transport means are capable of transport processing. SOLUTION: A control unit makes a lid 7 be detached by a lid attaching and detaching unit 15, moves a transport mechanism 10 to a delivery position, and then determines whether the transport processing of the substrate W is possible on the basis of the detected results of the substrate W by a mapping sensor provided on a mapping arm 21 and the detected results of the support members 43 by a support member sensor provided on a detection arm 35. COPYRIGHT: (C)2009,JPO&INPIT
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