| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device capable of detecting surely a fine linear flaw formed on a substrate. SOLUTION: This substrate inspection device for inspecting a foreign matter on the substrate 30 is equipped with an illumination system 1;1a, 1b for illuminating the substrate, an imaging system 2 for performing dark field observation of a domain on the substrate illuminated by the illumination system, and low reflection shielding members 3, 4 arranged on a transmission visual field background and a reflection visual field background of the imaging system. The substrate has a light transmission property, and the low reflection shielding members are arranged so as to cover the whole transmission visual field background and the whole reflection visual field background. COPYRIGHT: (C)2009,JPO&INPIT
|
