| 发明名称 |
COMPOSITION COMPRISING CHELATING AGENTS CONTAINING AMIDOXIME COMPOUNDS |
| 摘要 |
<p>The present invention is a novel aqueous cleaning solution for use in semiconductor front end of the line (FEOL) manufacturing process wherein the cleaning solution comprises at least one amidoxime compound.</p> |
| 申请公布号 |
WO2009085072(A1) |
申请公布日期 |
2009.07.09 |
| 申请号 |
WO2008US12237 |
申请日期 |
2008.10.29 |
| 申请人 |
EKC TECHNOLOGY, INC;LEE, WAI, MUN |
发明人 |
LEE, WAI, MUN |
| 分类号 |
C11D3/32;C11D3/39;C11D3/43;C11D7/08;C11D7/10;C11D7/32;C11D7/50;C11D11/00;G03F7/42;H01L21/02 |
主分类号 |
C11D3/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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