发明名称 Image Sensor and Method for Manufacturing Thereof
摘要 <p>An image sensor according to an embodiment includes a semiconductor substrate including a photodiode; a protective layer pattern having a lower trench that is disposed on the semiconductor substrate to expose the photodiode; an insulating layer pattern having the upper trench that is disposed on the lower trench of the protective layer pattern to expose the photodiode; and a wave guide that is disposed in the lower trench and the upper trench.</p>
申请公布号 KR100907156(B1) 申请公布日期 2009.07.09
申请号 KR20070105939 申请日期 2007.10.22
申请人 发明人
分类号 H01L27/146 主分类号 H01L27/146
代理机构 代理人
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