| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor unit for atmospheric analysis, atmosphere analyzer and a method of analyzing atmosphere and to simplify and miniaturize the analyzer constitution of the atmosphere analyzer equipped with a cleaning mechanism using a photocatalyst. SOLUTION: The sensor unit for atmospheric analysis is internally equipped with a substance responding sensor composed of a piezoelectric crystal and a sensor electrode provided to the main surface of the piezoelectric crystal, a photocatalyst layer provided to the main surface of the substance responding sensor, and an ultraviolet ray source arranged at the position opposed to the photocatalyst layer. COPYRIGHT: (C)2009,JPO&INPIT
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