| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect correction device improving the working efficiency of defect correction. SOLUTION: The defect correction device corrects a defect D generated on a substrate 6 by applying a correction material to the defect D. The device includes a plurality of correction material tanks 21 in which different correction materials are accommodated, and an application needle 5 which is provided to each correction material tank 21, projects to the substrate 6 side from an opening 21a provided below the correction material tank 21 and applies the correction material to the defect D. COPYRIGHT: (C)2009,JPO&INPIT
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