| 摘要 |
PROBLEM TO BE SOLVED: To reduce man-hours for selecting non-defective and defective articles in inspecting workpieces. SOLUTION: An inspecting device includes: a first acquisition part having a first imaging part collectively imaging workpieces based on the reflection light from the workpieces and acquiring the first image of the workpiece by the imaging part; a first comparing part comparing the first workpiece image with a first reference image stored in advance; a detecting part detecting a defect candidate region in the first workpiece image based on the comparison results by the first comparing part; a second acquisition part acquiring the second workpiece image corresponding to the defect candidate region; a second comparing part comparing the second workpiece image with a second reference image corresponding to the defect candidate region in the second reference image stored in advance; and a determining part determining whether the defect candidate region is a defect region based on the comparison results by the second comparing part. COPYRIGHT: (C)2009,JPO&INPIT
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