MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICAL COMPONENT

摘要

The invention relates to a micromechanical component (1), said micromechanical component comprising stationary electrodes (3) and a seismic mass (19) which is connected to a carrier substrate (18) by means of suspension elements (5), is mobile relative thereto and comprises counter electrodes which are interconnected via a first electrically conductive connection (8). Furthermore, the stationary electrodes comprise measurement electrodes (7) and decoupled electrodes, wherein the measurement electrodes are provided as electrical evaluation means and the counter electrodes (4) which are disposed opposite the decoupled electrodes (6) are provided as a mechanical element modifying the frequency band.